Object separating

ABSTRACT

An object separator may include a substrate, a fluid channel supported by the substrate, a pair of electrodes along the fluid channel to form a dielectrophoretic force to interact with an object entrained in a fluid, and an inertial pump supported by the substrate and positioned within the fluid channel to move the fluid along the fluid channel.

The present application is a continuation of U.S. patent applicationSer. No. 16/606,869 filed on Oct. 21, 2019, which was a 35 U.S.C. 371National Stage Application of PCT/US2018/015668 filed on Jan. 29, 2018,each of which is incorporated herein by reference.

BACKGROUND

The separation of objects in fluid such as the separation of cells,particles, bubbles and immiscible droplets, is performed in variousindustries. For example, in biology and medicine, rare cells are oftenseparated from a patient's blood for diagnosis. The separation ofobjects, such as rare blood cells, presents many challenges.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram illustrating portions of an examplemicrofluidic device and an example object separator.

FIG. 2 is a flow diagram of an example object separation method.

FIG. 3 is a schematic diagram illustrating portions of an examplemicrofluidic device and an example object separator.

FIG. 4 as a sectional view of the object separator of FIG. 3 taken alongline 4-4.

FIG. 5 is a schematic diagram illustrating portions of an examplemicrofluidic device and an example object separator.

FIG. 6 is a schematic diagram illustrating portions of an examplemicrofluidic device and an example object separator.

FIG. 7 is a sectional view of the object separator of FIG. 6 taken alongline 6-6.

FIG. 8 is a schematic diagram illustrating portions of an examplemicrofluidic device and an example object separator.

FIG. 9 is a schematic diagram illustrating portions of an examplemicrofluidic device and an example object separator.

Throughout the drawings, identical reference numbers designate similar,but not necessarily identical, elements. The figures are not necessarilyto scale, and the size of some parts may be exaggerated to more clearlyillustrate the example shown. Moreover, the drawings provide examplesand/or implementations consistent with the description; however, thedescription is not limited to the examples and/or implementationsprovided in the drawings.

DETAILED DESCRIPTION OF EXAMPLES

Disclosed herein are example object separators and object separatingmethods that may be used to facilitate the separation of fluid entrainedobjects out of a volume of fluid. The disclosed object separatorsutilize internally embedded inertial pumps to move fluid entrainingobjects through electric fields that exert a dielectrophoretic forceupon the objects entrained in the fluid to facilitate separation of theobjects. The internally embedded inertial pumps facilitate on-board oron-chip pumping of fluid to reduce cost and complexity. In someimplementations, inertial pumps facilitate recirculation of the fluidwhich provide multiple passes of the fluid through the electric fieldsfor potentially more thorough separation or extraction of objects fromthe fluid.

Dielectrophoresis (DEP) occurs when a force is exerted on a dielectricobject/particle when it is subjected to a non-uniform electric field.The dielectrophoretic force does not charge the object. Allobjects/particles exhibit dielectrophoretic activity in the presence ofelectric fields depending upon (A) the fluid, (B) the object'selectrical properties and (C) the frequency of the electric field. Thedisclosed object separators and object separating methods control thefrequency of the electric field to selectively interact with particularobjects in a flow or stream of fluid.

Disclosed herein are example object separators and object separatingmethods that utilize fluid ejectors to eject the objects that have beenseparated from the channel. For example, in one implementation, theobject separators and separating methods utilize a fluid actuator thatdisplaces fluid containing the separated object or objects through anozzle. The fluid ejectors facilitate precise control over the timingand rate at which the separated objects are extracted from the objectseparator. The ejected objects may then be further processed.

Disclosed herein are example object separators and object separatingmethods that utilize a recirculation passage extending from the firstside of electrodes to a second side of the electrodes. The recirculationpassage facilitates multiple passes of the fluid and multiple objectseparation cycles to separate and extract a greater percentage ofobjects from the fluid. The recirculation passage may further facilitatethe separation and extraction of different types of objects (havingdifferent electrical properties) during different passes of the fluidthrough the electrical fields. In one implementation, an additionalinertial pump is utilized to pump fluid through the recirculationpassage. In one implementation, after each pass, the separated objectsmay be ejected, such as with a fluid actuator through a nozzle opening.

Disclosed herein are example object separators and object separatingmethods that utilize both a recirculation passage and a holdingreservoir connected to the recirculation passage. The holding reservoirmay hold fluid containing various objects while selected first objectsor a selected first type of objects separated by the electrodes areejected to a first point of interest. The holding reservoir may holdfluid containing various objects while a first batch of fluid isrepeatedly recirculated across the electrodes and targeted objects arecaptured or retained. The fluid within the holding reservoir maysubsequently be processed across electrodes to separate selected secondobject or a selected second type of objects far subsequent ejection to asecond point of interest.

Disclosed herein are example object separators and object separatingmethods that utilize a controller to apply electrical current withvarying alternating frequencies to the electrodes at different times. Inother implementations, the object separator may comprise an array ofelectrodes, wherein the controller applies different alternatingfrequencies across different pairs of electrodes to attract (or repel)different types of objects within the fluid being pumped by the inertialpump. In some implementations, the objects separated from the fluid arepumped across an object sensor or counter, wherein the controllercontrols the actuation of the inertial pump, the recirculation of thefluid (when a recirculation passage is provided), the withdrawal offluid from the holding reservoir (when a holding reservoir is provided)and the creation of the electric field and their alternating frequenciesby the controller based upon signals from the object sensor.

In some implementations, the object separators include microfluidicpassages or channels. Microfluidic channels may be formed by performingetching, microfabrication (e.g., photolithography), micromachiningprocesses, or any combination thereof in a substrate of the fluidic die.Some example substrates may include silicon based substrates, glassbased substrates, gallium arsenide based substrates, plastic basedsubstrates, cellulose or paper based substrates, and/or other suchsuitable types of substrates for microfabricated devices and structures.Accordingly, microfluidic channels, passages, chambers, orifices, and/orother such features may be defined by surfaces fabricated in thesubstrate of a fluidic die. Furthermore, as used herein a microfluidicchannel or passage may correspond to a channel of sufficiently smallsize (e.g., of nanometer sized scale, micrometer sized scale, millimetersized scale, etc.) to facilitate conveyance of small volumes of fluid(e.g., picoliter scale, nanoliter scale, microliter scale, milliliterscale, etc.).

As used herein, an inertial pump corresponds to a fluid actuator andrelated components disposed in an asymmetric position in a fluidchannel, where an asymmetric position of the fluid actuator correspondsto the fluid actuator being positioned less distance from a first end ofthe fluid channel as compared to a distance to a second end of the fluidchannel. Accordingly, in some examples, a fluid actuator of an inertialpump is not positioned at a mid-point of a fluid channel. The asymmetricpositioning of the fluid actuator in the fluid channel facilitates anasymmetric response in fluid proximate the fluid actuator that resultsin fluid displacement when the fluid actuator is actuated. In suchimplementations, the inertial pump is located proximate to(asymmetrically closer to) a reservoir or chamber having a dimension atleast three times a size of the outlet of the chamber to the channel orpassage containing the fluid actuator. Repeated actuation of the fluidactuator causes a pulse-like flow of fluid through the fluid channel.

In some examples, an inertial pump includes at least one thermalactuator having a heating element (e.g., a thermal resistor) that may beheated to cause a bubble to form in a fluid proximate the heatingelement. In such examples, a surface of a heating element (having asurface area) may be proximate to a surface of a fluid channel in whichthe heating element is disposed such that fluid in the fluid channel maythermally interact with the heating element. In some examples, theheating element may comprise a thermal resistor with at least onepassivation layer disposed on a heating surface such that fluid to beheated may contact a topmost surface of the at least one passivationlayer. Formation and subsequent collapse of such bubble may generateflow of the fluid. As will be appreciated, asymmetries of theexpansion-collapse cycle for a bubble may generate such flow for fluidpumping, where such pumping may be referred to as “inertial pumping.”

In other examples, the fluid actuator(s) forming an inertial pump maycomprise piezo-membrane based actuators, electrostatic membraneactuators, mechanical/impact driven membrane actuators, magnetostrictivedrive actuators, electrochemical actuators, external laser actuators(that form a bubble through boiling with a laser beam), other suchmicrodevices, or any combination thereof. In some implementations, thefluid actuators may displace fluid through movement of a membrane (suchas a piezo-electric membrane) that generates compressive and tensilefluid displacements to thereby cause inertial fluid flow.

As will be appreciated, the fluid actuator forming the inertial pump maybe connected to a controller, and electrical actuation of the fluidactuator by the controller may thereby control pumping of fluid.Actuation of the fluid actuator may be of relatively short duration. Insome examples, the fluid actuator may be pulsed at a particularfrequency for a particular duration. In some examples, actuation of thefluid actuator may be 1 microsecond (μs) or less. In some examples,actuation of the fluid actuator may be within a range of approximately0.1 microsecond (μs) to approximately 10 milliseconds (ms). In someexamples described herein, actuation of the fluid actuator includeselectrical actuation. In such examples, a controller may be electricallyconnected to a fluid actuator such that an electrical signal may betransmitted by the controller to the fluid actuator to thereby actuatethe fluid actuator. Each fluid actuator of an example microfluidicdevice may be actuated according to actuation characteristics. Examplesof actuation characteristics include, for example, frequency ofactuation, duration of actuation, number of pulses per actuation,intensity or amplitude of actuation, phase offset of actuation.

Disclosed herein is an object separator may include a substrate, a fluidchannel supported by the substrate, a pair of electrodes along the fluidchannel to form a dielectrophoretic force to interact with an objectentrained in a fluid and an inertial pump supported by the substrate tomove the fluid along the fluid channel.

Disclosed herein is an example method that may include moving fluidthrough a channel of the substrate with an inertial pump supported bysubstrate and applying a dielectrophoretic force to an object entrainedin the fluid separate the object from other objects in the fluid.

Disclosed herein is an example method that may include moving a fluidentraining a first object and a second object through a channel during afirst pass, applying a first dielectrophoretic force to the first objectwithin the channel during the first pass to retain the first objectwithin the channel, following the first pass, moving the fluid to aholding reservoir, altering application of the dielectrophoretic forceto release the first object within fluid channel and ejecting thereleased first object from the channel. The example method may furtherinclude moving the fluid from the reservoir through the fluid channelduring a second pass, applying a second dielectrophoretic force to thesecond object during the second pass to retain the second object withinthe channel, following the second pass, altering application of thedielectrophoretic force to release the second object within the channeland ejecting the released second object from the channel.

FIG. 1 schematically illustrates portions of an example microfluidicdevice 20 having an example object separator 22. Object separator 22pumps fluid and its entrained objects across at least one electricalfield using an inertial pump, wherein the at least one electrical fieldexerts a dielectrophoretic force upon selected targeted objects tofacilitate separation of the targeted objects from other non-targetedobjects in the fluid. The microfluidic device is largely self-containedin that the inertial pumps are incorporated into or supported by thesame substrate that supports the electrical field generating electrodes.Microfluidic device 20 reduces or eliminates the use of external fluidpumping devices and the fluid couplers or connectors that connect theexternal fluid pumping devices to the substrate. The incorporation ofthe inertial pumps into or onto the substrate of microfluidic device 20further facilitates a reduction in the size and scale of microfluidicdevice 20. As a result, the microfluidic device 20 is less complex andis less costly. Object separator 22 comprises substrate 24, fluidchannel 28, inertial pump 30, and an array 32 of electrodes 34.

Substrate 24 comprises at least one layer of material or materials.Examples of materials from which substrate 24 may be formed include, notlimited to, silicon, glass, ceramics and/or polymers. In oneimplementation, substrate 24 may be formed from SUB. In otherimplementations, substrate 24 may be formed from other materials orcombinations of materials.

Substrate 24 comprises comprise a body supporting inertial pump 30 andelectrodes 34. Substrate 24 further forms or defines fluid channel 28.Thus, in an example, the inertial pump is present within the fluidchannel. In one implementation, in which channel 28 comprises aninternal tube or passage, substrate 24 completely surrounds channel 28(where FIG. 1 is illustrating substrate 24 in section to schematicallyillustrate the channels/passages). In one implementation, the channelsare formed by imprinting or molding of a layer material formingsubstrate 24. In another implementation, the channels are formed bycutting, ablation, etching or other material removal processes carriedout on the layer or layers of material forming substrate 24. In anotherimplementation, the channels are formed by selective deposition, such asprinting or additive manufacturing processes carried out upon anunderlying base layer or platform.

Fluid channel 28 is formed in substrate 24. In one implementation, fluidchannel 28 comprises an internal tube or passage completely surroundedby the material of substrate 24 (where FIG. 1 is illustrating substrate24 in section to schematically illustrate the channels/passages). Inanother implementation, fluid channel 28 may be formed by a grooveextending into substrate 24, wherein the groove is covered by a lid orother structure. In one implementation, channel 28 may be formed byimprinting or molding of a layer material forming substrate 24. Inanother implementation, channel 28 may be formed by cutting, ablation,etching or other material removal processes carried out on the layer orlayers of material forming substrate 24. In another implementation,channel 28 may be formed by selective deposition, such as printing oradditive manufacturing processes carried out upon an underlying baselayer or platform.

Fluid channel 28 is connected to a source of fluid 47 containing anobject or objects to be subsequently separated by separator 22. Examplesof the objects that may be separated include, but are not limited tocells, particles, bubbles and immiscible droplets. In oneimplementation, the objects that may be focused and/are separatedconsist of objects selected from a group of objects consisting of atleast one of cells, particles, bubbles and immiscible droplets. Examplesof the fluid that and trains the objects include, but are not limitedto, water, phosphate buffered saline, phosphate buffered sucrose,fluorescence activated cell sorter (FACS) buffer, cell lysate media,cell culture media, blood, blood plasma, blood serum, urine, cerebralspinal fluid, tears and milk. Fluid channel 28 guides a flow of thefluid entraining the objects through the electrical field formed by thearray 32 of field generating electrodes 34.

Inertial pump 30 displaces fluid and pumps fluid along fluid channel 28.Inertial pump 30 comprises at least one fluid actuator formed uponsubstrate 24 and asymmetrically positioned in a fluid channel 28, wherean asymmetric position of the at least one fluid actuator corresponds tothe fluid actuator being positioned less distance from a first end therespective passage as compared to a second end of fluid channel 28 on anopposite side of electrodes 34 as an inertial pump 30. The at least onefluid actuator forming the inertial pump is not positioned at amid-point of the passage between the source of the particular fluid andthe end of channel 28 on an opposite side of electrodes 34 has aninertial pump 30. The asymmetric positioning of the at least one fluidactuator in a fluid channel 28 facilitates an asymmetric response influid proximate the fluid actuator that results in fluid displacementwhen the fluid actuator is actuated. Repeated actuation of the at leastone fluid actuator causes a pulse-like flow of fluid through respectivepassage towards and across electrodes 34.

In some examples, an inertial pump includes at least one thermalactuator having a heating element (e.g., a thermal resistor) that may beheated to cause a bubble to form in a fluid proximate the heatingelement. In such examples, a surface of a heating element (having asurface area) may be proximate to a surface of fluid channel 28 in whichthe heating element is disposed such that fluid in the microfluidicchannel may thermally interact with the heating element. In someexamples, the heating element may comprise a thermal resistor with atleast one passivation layer disposed on a heating surface such thatfluid to be heated may contact a topmost surface of the at least onepassivation layer. Formation and subsequent collapse of such bubble maygenerate inertial flow of the fluid. As will be appreciated, asymmetriesof the expansion-collapse cycle for a bubble may generate such flow forfluid pumping, where such pumping may be referred to as “inertialpumping.”

In other implementations, the fluid actuators forming the inertial pump30 may comprise piezo-membrane based actuators, electrostatic membraneactuators, mechanical/impact driven membrane actuators, magnetostrictivedrive actuators, electrochemical actuators, laser heating, other suchmicrodevices, or any combination thereof. In some implementations, thefluid actuator forming the inertial pump 30 may displace fluid throughmovement of a membrane (such as a piezo-electric membrane) thatgenerates compressive and tensile fluid displacements to thereby causefluid flow. Inertial pump 30 may be activated and controlled byelectrical signals transmitted from a controller supported by substrate24 or a remote controller across electric conductive wires, lines ortraces formed within or upon substrate 24.

Electrodes 34 are situated along fluid channel 28 and array 32 ofdifferently charged electrodes. In one implementation, adjacent oroffice electrodes have opposite surfaces that are spaced apart from oneanother such by a distance substantially (plus/minus 20%) equal to adimension or diameter of the targeted object or objects to be targeted.In some implementations, different adjacent electrode pairs may havedifferent spacings for retaining or attracting differently sizedobjects.

Electrodes 34 may be differently electrically charged so as to form anonuniform electric field 42 between adjacent, consecutive or oppositepairs of electrons, wherein the nonuniform electric field 42 exerts adielectrophoretic force upon object 44 or multiple objects 44 entrainedin the fluid 46 (schematically represented by arrows) being inertiallypumped along channel 28 across electrodes 34. Electrodes 34 may be atdifferent electrical potentials relative to one another. For example,one of electrodes 34 may be at a positive or negative charge while theother of electrodes 34 is grounded. In yet another implementation, oneelectrodes 34 may be at a first nonzero charge while the otherelectrodes 34 and is at a second different non-zero electrical charge.The electrical current flowing through the different electrodes 34 maybe different relative to one another. In one implementation, theelectrical current in the charge electrode(s) is a nonuniformalternating current.

In one implementation, the electric field 42 has a strength sufficientso as to grab objects flowing through the electric field given the rateat which the fluid is inertially pumped across the electric field orthrough the electric field. In one implementation, the electric fieldhas a field strength of at least 10 mV RMS and up to 1000 V RMS. Theelectric field strength may also vary depending upon spacing ofelectrodes 34.

In one implementation, the frequency of the alternating current iscontrolled so as to control what types of objects are targeted forseparation. For example, for objects in the form of HeLa cells carriedin a high conductivity solution, such as, for example, in a solutionhaving a conductivity of 0.58 millisiemens/cm, an alternating currenthaving a frequency within the range of 70 to 150 kHz, and nominally 120kHz, may be used to attract and retain (target) such cells usingdielectrophoretic forces. In other implementations, other alternatingcurrent frequencies ranging from 10 kHz to 1000 kHz may be applied totargets different objects depending upon the die electrophoreticproperties of the objects themselves and the electrical properties ofthe medium carrying the objects, such as the electrical conductivity ofthe medium.

For purposes of this disclosure, a “targeted” or “target” object refersto an object to be held or retained by dielectrophoretic forces of anonuniform electrical field. A “non-targeted” or “nontarget object”refers to an object that, is permitted to be carried through thenonuniform electrical field, past or across the electrodes forming thenonuniform electrical field. A “targeted” object may be an object ofinterest or the non-targeted object may be an object of interest. Forexample, dielectrophoretic forces may be used to retain objects ofinterest while those objects not of interest are allowed to flow out ofthe separator and wherein the retained objects of interest aresubsequently released for collection, counting or analysis.Alternatively, dielectrophoretic forces may be used to retain thoseobjects not of interest, wherein objects of interest are allowed to flowout of the separator for collection, counting or analysis

Although electrodes 34 are schematically illustrated as bands ofelectrically conductive material extending across fluid channel 28, in adirection perpendicular to the direction in which fluid 46 is beinginertially pumped by inertial pump 30, in other implementations,electrodes 34 may have other shapes and arrangements. For example, inother implementations, electrodes 34 may extend across fluid channel 28in a direction oblique to channel 28 and oblique to the direction inwhich fluid 46 is being inertially pumped by inertial pump 30. In otherimplementations, electrodes 34 may comprise opposing electrodes on oralong opposite interior faces of fluid channel 28. In otherimplementations, electrodes 34 may comprise interdigitated portions ormay not extend completely across fluid channel 28, extending partiallyacross fluid channel 28 or being spaced from opposite faces of channel28.

Although array 32 is illustrated as comprising a pair of electrodes 34,in other implementations, array 32 may comprise greater than twoelectrodes, wherein the multiple electrodes form multiple pairs ofadjacent electrodes. In some implementations, two adjacent “pairs” ofelectrodes may share a center electrode. For example, first and thirdcharged electrodes may share a center electrode that is grounded. Insome implementations, the electrodes of the array 32 may be sequencedbetween different electrical charges and/or frequencies. For example,the array 32 electrodes may comprise electrodes in numerical series,wherein during a first instance, the first and second electrodes form afirst nonuniform electrical field, the third and fourth electrodes forma second nonuniform electrical field and so on down the series. During asecond instance, the second and third electrodes form a first nonuniformelectrical field, the fourth and fifth electrodes form a secondnonuniform electrical field and so on down the series.

The dielectrophoretic force formed by charged electrodes 34 differentlyinteracts with different objects based upon their different dielectricproperties. The dielectrophoretic force may differently interact with atargeted object as compared to a non-targeted object, facilitatingseparation or different processing of the targeted objects versusnontargeted objects. In one implementation, the dielectrophoretic forcemay be attractive, retaining object 44 in place as a stream of fluid 46carrying other objects having different properties than object 44 isinertially pumped past electrodes 34.

In one implementation, after the targeted objects or objects of interesthave been retained by the dielectrophoretic force and the fluid,entraining the other objects not of interest, has been pumped pastelectrodes 34 and discharged or ejected, electrodes 34 may bedifferently charged, such as at a different frequency, so as to exert adielectrophoretic force that repels the object 44, that was previouslyretained by the different dielectrophoretic force, away from electrodes34. In such an implementation, inertial pump 30 may inertially pump adifferent fluid across electrodes 34 to carry the released objects 44 toa target destination. For example, one implementation, the releasedobjects 44 may be inertially pumped to a location where the releasedobjects 44 are counted, processed or ejected for collection or furtherprocessing.

FIG. 2 is a flow diagram of an example object separating method 100.Method 100 facilitates the separation of targeted or selected objectsfrom other non-targeted objects in a fluid by inertially pumping astream of the fluid through a nonuniform electrical field formed bycharged electrodes, wherein the nonuniform electrical field exertsdifferent dielectrophoretic forces upon targeted objects, as compared tonontargeted objects, to facilitate separation of the targeted objects.Although method 100 is described in the context of being carried out byobject separator 22 of microfluidic device 20, it should be appreciatedthat method 100 may likewise be carried out with any of the microfluidicdevices and object separator disclosed herein as well as other similarobject separator's and microfluidic devices.

As indicated by block 104, inertial pump 30 inertially moves fluidthrough channel 28 of substrate 24. The fluid moving through the channelis directed across or through at least one non-uniform electrical fieldformed by electrodes 34 within channel 28. As indicated by block 108,the charged electrodes 34 apply a dielectrophoretic force to a targetedobject or targeted objects entrained within the fluid being inertiallypump within channel 28 so as to separate the targeted object from othernontargeted objects in the fluid stream.

FIGS. 3 and 4 illustrate portions of an example microfluidic device 220and portions of an example object separator 222 provided on themicrofluidic device 220. Object separator 222 comprises substrate 24(described above), fluid sources 226A, 226B (collectively referred to asfluid sources 226), fluid channel 228, inertial pumps 230A, 230B(collectively referred to as inertial pumps 230), an array 232 ofelectric field generating electrodes 234, fluid ejector 240 andcontroller 244.

Fluid sources 226 comprise sources of fluid for fluid channel 28. Eachof fluid sources 226 is connected to fluid channel 228. Each of fluidsources 226 226 has a fluid containing volume with a dimension D1 atleast three times greater than the dimension D2 of fluid channel 228 tofacilitate inertial pumping in the direction indicated by arrows 255across the electrical fields produced by the array 232 of electrodestowards fluid ejector 240. Inertial pump 230 is asymmetricallypositioned within fluid channel 228, positioned closer to fluid source226 as compared to fluid ejector 240.

In the example illustrated, object separator 222 comprises two fluidsources 226A and 226B. Fluid source 226A comprises a volume formed insubstrate 24 that stores or that receives a heterogeneous fluid fromwhich objects are to be targeted. Examples of the heterogeneous fluidsthat may be supplied by fluid source 226A and in which different objectsmay be contained include, but are not limited to, water, phosphatebuffered saline, phosphate buffered sucrose, fluorescence activated cellsorter (FACS) buffer, cell lysate media, cell culture media, blood,blood plasma, blood serum, urine, cerebral spinal fluid, tears and milk.

Fluid source 226B comprises a volume formed in substrate 24 that storesor that receives a secondary fluid. The secondary fluid is to bedirected into fluid channel 228 after the targeted objects have beenseparated out of the heterogeneous fluid. In one implementation, thesecondary fluid may comprise an elution or flushing fluid which carriesreleased targeted objects out of channel 228 for collection orprocessing. In one implementation, secondary fluid may carry thereleased targeted objects to fluid ejector 240 for ejection. In anotherimplementation, the secondary fluid may comprise a fluid that reactswith the targeted objects residing in separation region 231. Forexample, in one implementation, the secondary fluid may comprise areagent that reacts with the targeted objects prior to discharge of thetargeted objects from fluid channel 228 for ejection of the targetedobjects by fluid ejector 240. In one implementation, the fluid withinsources 226 are selectively directed to channel 228 by inertial pumps230. In some implementations, additional valve mechanisms may beprovided to selectively supply channel 228 with fluid from fluid sources226.

In some implementations, fluid sources 226A and 226B may be provided bya single fluid source. In such an implementation, object separator 222may comprise a single fluid source 226 in the form of a port orreservoir through which heterogeneous fluid 252 may be initiallysupplied and through which a secondary fluid may be subsequentlysupplied. After the heterogeneous fluid has been discharged from fluidsource 266 and discharged from channel 228, fluid source 266 may befilled or supplied with a secondary fluid. The secondary fluid may thenbe inertially pumped through channel 228.

Fluid channel 228 extends from fluid source 226. Fluid channel 228guides a flow of the heterogeneous fluid from fluid source 226, throughthe electrical fields formed by the array 232 of field generatingelectrodes 34 and to fluid ejector 40. In the example illustrated, fluidchannel 228 has a tapering portion 229 which tapers from a largerseparation region 231 to a smaller object ejection region 233 wherefluid and targeted objects may be ejected by fluid ejector 240. In oneimplementation, object ejection region 233 has a cross-sectional arealess than or equal to two times a minimum dimension of targeted objectsto facilitate a single-file column or series of targeted objects flowingto fluid ejector 40 for ejection. The single file ordering facilitatesprecise control over a rate at which objects are ejected and anamount/number of objects being ejected. In other implementations,tapering portion 229 may be omitted, wherein the targeted objects aredirected to fluid ejector 240 in a more random parallel fashion ratherthan a serial order. Although fluid channel 228 is illustrated as beingsubstantially linear, it should also be appreciated that fluid channel228 may be serpentine, curved or of other shapes.

Inertial pumps 230A, 230B inertially pump fluid from their respectivefluid sources 226A, 226B. Each of inertial pumps 230 is similar toinertial pump 30 described above. The use of the embedded inertial pumps230 as part of microfluidic device 220 facilitates a single integratedobject separator in which both pumps and electrodes are supported by asingle substrate 24. As a result, object separator 222 is less complex,less costly and may be more easily incorporated into a microfluidicchip.

Array 232 of electrodes 234 extends in serial fashion along the lengthof object separating region 231 of fluid channel 228. Each electrodecomprises a band or region of electrically conductive material formedupon or within substrate 24 so as to conduct electrical current.Electrodes 234 cooperate with one another to form pairs of electrodesacross which a nonuniform electrical field may be formed or createdunder the control of controller 244.

Although electrodes 234 are illustrated as bands of electricallyconductive material extending across fluid channel 228, in a directionperpendicular to the direction in which fluid 252 is being inertiallypumped by inertial pump 230, in other implementations, electrodes 234may have other shapes and arrangements. For example, in otherimplementations, electrodes 234 may extend across fluid channel 228 in adirection oblique to channel 228 and oblique to the direction in whichfluid 252 is being inertially pumped by inertial pump 230. In otherimplementations, electrodes 234 may comprise opposing electrodes on oralong opposite interior faces of fluid channel 28. In otherimplementations, electrodes 34 may comprise interdigitated portions ormay not extend completely across fluid channel 228, extending partiallyacross fluid channel 28 or being spaced from opposite faces of channel228.

Fluid ejector 240 selectively ejects fluid and objects from fluidchannel 228. In one implementation, fluid ejector 240 selectively ejectsdroplets of fluid in a controlled fashion from fluid channel 228. In oneimplementation, fluid ejector 240 comprises an orifice or nozzle opening260 and a fluid actuator 262. Fluid actuator 262 is positioned so as toselectively displace fluid within ejection region 233 through nozzleopening 260 in the direction indicated by arrow 259 through nozzleopening 260 into an object receiving test strip, passage, receptacle orcollection reservoir 263. In one implementation, fluid actuator 262 mayhave a heating element (e.g., a thermal resistor) that may be heated tocause a bubble to form in a fluid proximate the heating element.Formation and subsequent collapse of such bubble may generate flow ofthe fluid.

In other examples, the fluid actuator(s) forming fluid ejector 240 maycomprise piezo-membrane based actuators, electrostatic membraneactuators, mechanical/impact driven membrane actuators, magnetostrictivedrive actuators, electrochemical actuators, external laser actuators(that form a bubble through boiling with a laser beam), other suchmicrodevices, or any combination thereof. In some implementations, thefluid actuators may displace fluid through movement of a membrane (suchas a piezo-electric membrane) that generates compressive and tensilefluid displacements to thereby displace fluid through nozzle opening260.

Controller 244 comprises computer or electronic hardware that controlsthe activation of inertial pump 230, the supply of electrical current toarray 32 of electrodes 234 and the activation of fluid ejector 240.Controller 244 may be a single control unit on substrate 24 or remotefrom substrate 24. In other implementations, the functions of controller244 may be distributed amongst multiple separate control units, eitherprovide on substrate 24 and/or remote from substrate 24. In oneimplementation, each control unit of controller 244 may comprise anintegrated circuit, such as an application-specific integrated circuit.In yet another implementation, each control unit of controller 244 maycomprise a processing unit that follows instructions, programming orcode stored in a non-transitory computer-readable medium. Controller 244transmits control signals, which control the activation of inertial pump230, the supply of electrical current to array 32 of electrodes 234 andthe activation of fluid ejector 240 across electrically conductive wiresor traces formed upon or supported by substrate 24. In implementationswhere controller 270 is remote or separate from substrate 24, substrate24 may comprise electrical contact pads, plugs or ports for electricallyconnecting controller 270 to the electrically conductive traces.

Controller 244 outputs control signals selectively activating inertialpumps 230. Controller 244 controls whether heterogeneous fluid orsecondary fluid is being directed through channel 28. Controller 244further controls the rate at which fluid (whether the heterogeneousfluid the secondary fluid) is inertially pumped from fluid sources 226through the nonuniform electrical fields formed by electrodes 234. Therate at which the heterogeneous fluid or the secondary fluid isinertially pumped along fluid channel 228 may be varied by controller244 based upon the type of the objects being targeted, the type of fluidmedium carrying the objects, and/or the anticipated concentration ordensity of the targeted and/or nontargeted objects in the fluid.

Controller 270 outputs control signals which control the supply ofelectrical current to the different electrodes 234. As schematicallyshown by FIG. 3 , in one implementation, controller 270 outputs suchcontrol signals to an electrical power frequency generating component246 electrically connected each pair of adjacent non-uniform electricalfield generating electrodes so as to control the frequency of thealternating current flowing through and across each those electrodesthat are being electrically charged. In the example illustrated, eachadjacent pair of electrodes 234 is provided with an alternating currenthaving a same selected frequency. The frequency of the alternatingcurrent applied to each of the charged electrodes may vary under thecontrol of controller 244 depending upon characteristics of the targetedobjects 254, the nontargeted objects 256 and the fluid medium carryingthe objects. The frequency of those charged electrodes that form anonuniform electrical field with adjacent charged or unchargedelectrodes may be selected so as to exert a dielectrophoretic force uponthe targeted objects 254 and a different dielectrophoretic force (or nodielectrophoretic force) with respect to the nontargeted objects 256.

Controller 270 may output control signals controlling the ejection offluid by fluid ejector 240. In one implementation, controller 244 mayoutput control signals causing fluid ejector 240 to eject fluid and thenontargeted objects 256 through nozzle opening 260 while the targetedobjects 254 remain retained within separation region 231 by thedielectrophoretic forces. Thereafter, controller 244 may adjust thefrequency of the alternating current applied supplied to the electrodes234 or may terminate the supply of electrical power to electrodes 234altogether so as to release the targeted objects 24 into the secondaryfluid that is pumped from fluid source 226B through fluid channel 228,carrying the released targeted objects 254 to fluid ejector 240 forejection through nozzle opening 260.

In yet another implementation, the fluid and the nontargeted objects 256may be inertially pumped by inertial pump 230 past or across fluidejector 240 (as indicated by arrow 263) to a further downstreamlocation, not using fluid ejector 240 for ejecting the fluid andnontargeted objects 256 that have passed across electrodes 234.Thereafter, controller 244 may adjust the frequency of the alternatingcurrent applied supplied to the electrodes 234 or may terminate thesupply of electrical power to electrodes 234 altogether so as to releasethe targeted objects 254 into the secondary fluid that is pumped fromfluid source 226B through fluid channel 228, carrying the releasedtargeted objects 254 to fluid ejector 240 for ejection through nozzleopening 260.

FIG. 5 schematically illustrates portions of an example microfluidicdevice 320 and portions of an example object separator 322. Objectseparator 322 is similar to object separator 222 described above exceptthat object separator 322 comprises multiple electrical power frequencygenerating components 246A, 246B, 246C (collectively referred to ascomponents 246) under the control of controller 244. Those remainingelements of object separator 422 which correspond to elements of objectseparator 222 are numbered similarly.

The different electrical power frequency generating components 246 maybe operated independently of one another such that different subsets ofthe array 232 of electrodes 234 may be supplied with alternating currenthaving different frequencies. The different frequencies concurrentlyapplied to the different subsets of electrodes 234 may be chosen so asto interact with different targeted objects. For example, a first subsetof the array 232 may be provided with a first frequency of alternatingcurrent that attracts (or repels) a first type of targeted object, asecond subset of rate to 232 may provide with a second differentfrequency of alternating current that attracts (or repels) a second typeof targeted object and a third subset of the array 232 may be providedwith a third different frequency, different than the first frequency anddifferent than the second frequency, that attracts (or repels) a thirdtype of targeted object.

As a result, multiple different types of targeted objects may beconcurrently retained within separation region 231 from a single pass ofthe heterogeneous fluid 232 through separation region 231, while theremaining nontargeted objects move out of separation region 231 forbeing ejected by ejector 240 or flowing further downstream past ejector240. Thereafter, the frequency of the alternating current applied to thedifferent subsets of array 232 may be independently adjusted orunpowered to selectively release selected portions of the total numberof different types of targeted objects retained in separation region231. For example, the alternating current supplied to the first subset232 of electrodes 234 may be adjusted or discontinued so as to releasethe first type of targeted objects while the second and third type oftargeted objects remain attracted to their respective second and thirdsubsets of array 232 of electro 234. After flushing the first subset oftargeted electrodes out of separation region 231 with the secondaryfluid from fluid source 226B by inertial pump 230B and after dischargeof the first type of target objects by ejector 240, this process may besequentially repeated for the second and third subsets of array 232 ofelectrodes 234. In one implementation, nozzle opening 260 of fluidejector 240 may be positioned above different collection reservoirs orreceiving stations at different times when discharging or ejecting thedifferent types of targeted objects.

FIGS. 6 and 7 illustrate portions of an example microfluidic device 420and portions of an example object separator 422. Object separator 422 issimilar to object separator 222 except that object separator 422additionally comprises object sensor 470. Those remaining components ofobject separator 422 which correspond to components of object separator222 are numbered similarly.

Object sensor 470 senses the presence, passage or characteristics ofobjects. In one implementation, object sensor 470 comprises an impedancesensor formed by a pair of electrodes 472. Objects passing through theelectric field between the electrodes 472 alter electrical impedance ofthe electrical field, wherein controller 244 senses the change inelectrical impedance. In one implementation, controller 244 correlates achange in impedance to the presence or passage of so as to count thepassage of objects. In one implementation, controller 244 mayalternatively or additionally correlate the change of impedance to thesize of the object, wherein the size of the object may be used toidentify the type of object or a characteristic of the object beingsensed.

In other implementations, object sensor 470 may comprise other types ofsensors that detect the passage or presence of an object orcharacteristics of the object. For example, in other implementations,object sensor 470 may comprise an optical sensor or photosensor, havingan optical emitter and an optical detector that direct light across orthrough portions of channel 228, wherein the presence of an objectinterrupts the transmission of the light and wherein the interruptionsare detected by controller 244 to count the passage of objects or toidentify characteristics of the object. In still other implementations,object sensor 470 may comprise other types of sensors that sense apastor presence of an object or characteristics of the object.

In the example illustrated, object sensor 470 is located betweenelectrodes 234 and fluid ejector 240 such a detect account objects thathave exited or are about to exit separation region 231. In the exampleillustrated, object sensor 470 is located between the tapering region229 and fluid ejector 240, within ejection region 233, such that theobjects being sensed by sensor 470 past sensor 470 in a serial,single-file order, enhancing the counting of such objects. In otherimplementations, object sensor 470 may be provided at other locations.

In one implementation, controller 244 utilizes signals from objectsensor 470 to adjust the operational parameters of inertial pump 230,the operational characteristics of the electrical power being suppliedto electrodes 234 and/or the operation of ejector 240. For example,depending upon the rate at which objects are being supplied to fluidejector 240, controller 244 may adjust the rate at which fluid (theheterogeneous fluid or the secondary fluid) is being inertially pumpedby inertial pump 230A or 230B. After targeted objects have been ejectedby fluid ejector 240, controller 244 may adjust the rate at which thefluid from fluid source 226A is pumped through fluid channel 228 basedupon the number of targeted objects extracted during an earlier process.In one implementation, based upon signals from object sensor 470,controller 244 may adjust the electrical potential between adjacentelectrodes, the electrical current supplied to electrodes and/or thefrequency of the electrodes to enhance the separation of targetedobjects. In one implementation, controller 470 may adjust the rate atwhich fluid ejector 240 is operated or when fluid ejector 260 isoperated based upon signals from object sensor 470.

FIG. 8 illustrates portions of an example microfluidic device 520 andobject separator 522. Object separator 522 is similar to objectseparator 222 described above except that object separator 522additionally comprises recirculation passage 578, object sensors 580A,580B, 580C (collectively referred to as object sensors 580) and inertialpumps 582A, 582B and 5820 (collectively referred to as inertial pumps582. Remaining components of microfluidic device 520 and objectseparator 522 which correspond to components of microfluidic device 220and object separator 222 are numbered similarly.

Recirculation passage 578 comprises a fluid channel supported bysubstrate 24 having a first portion connected to fluid channel 228 on afirst side of the array 232 of electrodes 234 and a second portionconnected to channel 228 on a second side of the array 232 of theelectrodes 234. In the example illustrated, recirculation passage 578extends from the ejection region 233 between array 232 and fluid ejector240 two separation region 231 between array 232 and inertial pumps 230.Recirculation passage 578 provide a channel by which fluid and objects(both targeted and nontargeted objects) that have passed array 232 maybe recirculated or redirected from a downstream side back to an upstreamside of array 232 to once again attempt to retain targeted objectsthrough the application of a dielectrophoretic force upon the targetedobjects entrained in the fluid.

Object sensors 580 comprise sensors that detect the presence or flow ofobjects (targeted and/or nontargeted) relative to such sensors. In oneimplementation, each of object sensors 580 may be similar to objectsensor 470 described above. In some implementations, the two illustratedobject sensors 580 may comprise different types of object sensors.

In the example illustrated, object sensor 580A is located between aninlet of recirculation passage 578 and fluid ejector 240. Object sensor580 output signals to controller 244 indicating the flow of fluid and/orobjects towards fluid ejector 240. In one implementation, controller 244may utilize such signals to control the operational parameters ofinertial pumps to 30, frequency generating circuit 246, fluid ejector240 and/or inertial pumps 582.

Object sensor 580B is located along recirculation passage 578. Objectsensor 580B outputs signals indicating the flow of fluid and/or objectsthrough recirculation passage 578. In one implementation, controller 244may utilize such signals to control the operational parameters ofinertial pumps 230, frequency generating circuit 246, fluid ejector 240and/or inertial pumps 582. Object sensor 580C is located at an inlet ofholding reservoir 590. Signals from object sensor 580C may be used bycontroller 244 to determine the concentration or number of objectscontained in holy whether 590 or the types of objects contained inholding reservoir 590.

Inertial pumps 582 are each similar to inertial pumps to 30 describedabove. Inertial pumps 582 are situated along recirculation passage 578,wherein inertial pump 582 may be sequentially activated to inertiallypump fluid through recirculation passage 578. In the exampleillustrated, inertial pump 582A, 582B and 582C are asymmetricallylocated so as to pump fluid in the directions indicated by arrows 583A,583B and 583C, respectively.

In one implementation, controller 244 activates inertial pumps 582 torepeatedly circulate fluid contain the targeted objects 254 across array232 to acquire or retain a targeted quantity of the target objects 254.Once the targeted quantity or amount of targeted objects 254 has beenretained along array 232, the remaining heterogeneous fluid may bedischarged either by fluid ejector 240 or further downstream by passage228. Thereafter, controller 244 may alter the operational parameters ofelectrical power frequency generating component 246, such as by alteringthe frequency of the alternating current supplied by electrical powerfrequency generating component 246 so as to release the retainedtargeted objects. Controller 244 may further activate inertial pump 230Bto apply the secondary fluid from source 226B to the retained targetedobjects 254, carrying the targeted objects 254 downstream for eitherejection by fluid ejector 240 and/or further downstream along channel228, for further processing or handling.

In one implementation, signals from object sensor 580B may indicate thenumber and/or concentration of targeted objects being recirculated alongrecirculation passage 578. In one implementation, controller 244 maycontinue recirculating fluid through recirculation passage 578 maycontinue to cyclically retain more and more targeted objects 254 untilsignals from sensor 580B indicate a concentration of targeted objects254 below a predetermined threshold concentration level. In anotherimplementation, the concentration of targeted objects in fluid that ispassed array 232 may be determined using object sensor 580A, wherein anindicated concentration exceeding a predetermined thresholdconcentration may result in controller 244 further recirculating thefluid through recirculation passage 578.

In yet another implementation, as indicated by broken lines, objectseparator 52 may additionally comprise a sensor 584 which senses theconcentration or amount of targeted objects 544 currently retained byarray 232. For example, sensor 584 may comprise an optical sensor whichtransmits light through substrate 24 across array 232 or which islocated along and within channel 228 proximate array 232 so as tooptically detect the concentration or amount of targeted objects 544currently retained by array 232 (prior to being flushed by a secondaryfluid). In yet other implementations, sensor 584 may comprise othertypes of sensors which sensed the presence of targeted objects 254.Based upon signals from sensor 584, controller 244 may control thenumber of times that fluid is recirculated through recirculation passage578, prior to being discharged by fluid ejector 240 or being dischargefurther downstream by channel 228.

FIG. 9 illustrates portions of an example microfluidic device 620 andobject separator 622. Object separator 622 is similar to objectseparator 522 except that object separator 622 comprises electricalpower frequency generating components 246A, 246B and 246C (collectivelyreferred to as components 246) and additionally comprises holdingreservoir 590 and inertial pumps 592A, 592B (collectively referred to asinertial pumps 592). Those remaining components of microfluidic device620 and object separator 622 which correspond to components ofmicrofluidic device 520 and object separator 522 are numbered similarly.

Electrical power frequency generating components 246 are described abovewith respect to object separator 322. As described above, the differentelectrical power frequency generating components 246 may be operatedindependently of one another such that different subsets of the array232 of electrodes 234 may be supplied with alternating current havingdifferent frequencies. The different frequencies concurrently applied tothe different subsets of electrodes 234 may be chosen so as to interactwith different targeted objects. As a result, multiple different typesof targeted objects may be retained within separation region 231 from asingle pass of the heterogeneous fluid through separation region 231,while the remaining nontargeted objects move out of separation region231.

Holding reservoir 590 comprises a chamber formed within or on substrate24 and connected to opposite sides of the array 232 of electrodes 234.In the example illustrated, holding reservoir 590 is further connectedto recirculation passage 578. Holding reservoir 590 serves as areservoir for collecting fluid and holding fluid for further separationprocesses.

Inertial pumps 592 are each similar to inertial pumps 230 describedabove. Each of such inertial pumps 592 is asymmetrically positioned soas to inertially pump fluid in a predefined direction. In the exampleillustrated, inertial pump 592A is asymmetrically located between ajunction with recirculation passage 578 and reservoir 590 inertial pump592A is located so as to inertially pump fluid in the directionindicated by arrow 593 towards reservoir 590. Inertial pump 592B isasymmetrically located between holding reservoir 590 and fluid channel228 so as to inertially pump fluid in the direction indicated by arrow594 towards fluid channel 228.

In one implementation, controller 244 activates inertial pump 230A toinertially pump fluid from heterogeneous fluid source 226A into fluidchannel 228, across array 232. Prior to or as the heterogeneous fluid isflowing across array 232, controller 24 further output control signalsactivating at least one of components 246 such that pairs of electrodes234 exerts dielectrophoretic force is upon objects in the heterogeneousfluid to retain the targeted objects as remaining portions of theheterogeneous fluid flow past array 232. In one operational mode, array232 may be activated to a single frequency so as to target a single typeof object. In another operational mode, controller 244 activates array232 to multiple different frequencies so as to concurrently targetmultiple different types of objects within the heterogeneous fluid.During such time, controller 244 further activates inertial pumps 582and 592. In response 592 are activated so as to function as valves,blocking the flow into reservoir 590. Pumps five E2 are activated so asto recirculate fluid for further passes across array 232. During suchtime, signals from object sensor 580B may be used by controller 244 todetermine the number or concentration of the at least one targetedobject being retained by array 232, or the concentration of targetedobjects being recirculated and not yet captured by array 232.

Upon determining that a sufficient number concentration of a targetedobject or multiple different types of targeted objects have beencaptured and are being retained by array 232, controller 244 may outputcontrol signals inactivating inertial pump 230A and activating inertialpumps 582A and 592A to inertially pump the remaining heterogeneous fluidwithin fluid channel 228 to a holding reservoir 590. Once the remainingfluid in fluid channel 228 has been pumped to holding reservoir 590,controller 244 may output control signals activating inertial pump 230Bso as to inertially pump the secondary fluid into fluid channel 228.Prior to or as the secondary fluid is flowing across array 232,controller 244 may further output control signals to components 246 soas to release at least one type of targeted and retained object. Duringsuch time, controller 244 may also turn off or inactivate inertial pumps582. In implementations where a single type of targeted object iscaptured by array 232, controller 244 may output control signals turningoff all of components 246 or adjusting a frequency of the alternatingcurrent provided by component 246 such that the dielectrophoretic forcesrepel, rather than attract, the targeted objects.

Due to the geometry of the circulation passage 578 and fluid channel228, the secondary fluid, carrying the released objects, flows acrossobject sensor 580A, past recirculation passage 578. In response toreceiving signals from object sensor 580A indicating the presence oftargeted objects, controller 244 may further output control signals tofluid ejector 240 so as to eject the targeted objects into adestination, such as a collection reservoir 263.

In implementations where multiple different types of targeted objectshave been concurrently captured by array 232, controller 244 mayselectively turn off individual components 246 or may selectively adjusta frequency of the alternating current provided by the individualcomponents 246 such that selected electrode pairs exertdielectrophoretic forces to repel selected targeted objects. During suchtime, fluid ejector 240 may be positioned over different collectionreservoirs, wherein controller 244 outputs control signals causing fluidejector 2402 eject the selected target object into the differentcollection reservoirs. In one implementation, the release of targetedobjects by array 232 may occur one at a time, wherein different types oftargeted objects are ejected into different collection reservoirs. Inanother implementation, different types of targeted objects may beconcurrently released to form a mixture of the selected object types,wherein the mixture is then ejected by fluid ejector 2402 a collectionreservoir.

After the targeted objects have been released and ejected, controller244 may output control signals activating inertial pump 5928 so as toinertially pump fluid from holding reservoir 590 into fluid channel 228.Controller 244 may output control signals activating components 246 soas to form nonuniform electric fields which exert dielectrophoreticforces upon targeted objects of the remaining fluid from holdingreservoir 590. The process described above is then repeated for thetargeted object contained in the fluid from holding reservoir 590. Inone mode of operation, controller 244 may additionally activate inertialpump 230A to inertially pump additional heterogeneous fluid into fluidchannel 228 for combining with the fluid from holding reservoir 590. Inanother mode of operation, inertial pump 230A may remain in active,where just the fluid from reservoir 590 is circulated across array 232.

As further indicated by broken lines, in some implementations,microfluidic device 620 and object separator 622 may additionallycomprise a heater 596 and a temperature sensor 598 (schematicallyillustrated). Heater 596 may extend below electrodes 234 or along a sideof channel 228. In one implementation, heater 596 may comprise a thermalresistor. Heater 596 heats the fluid within channel 228. Temperaturesensor 598 senses the temperature the fluid within channel 228 andoutput signals to controller 244, wherein controller 244 may adjust theoperational parameters of heater 596. The use of heater 596 and tempsensor 598, controller 244 may provide the fluid within channel 228 witha predetermined temperature and/or maintain a temperature of the fluidwithin channel 228. In some implementations, fluid holding reservoir 590may additionally include a heater 596 and a temperature sensor 598 tofacilitate control over the temperature of the fluid within holdingreservoir 590 by controller 244. In other implementations, heater 596and temp sensor 598 may be omitted.

Object separator 622 is illustrated as a combination of multiplefeatures from the above-described object separators. It should beappreciated that object separator 622 may omit selected features. Forexample, in one implementation, upper sieve or 622 may comprise a singlecomponent 246, wherein each of the electrodes 234 is supplied with analternating current of a single frequency during the flow of fluidacross array 232. In one implementation, object separator 622 may omitholding reservoir 590 and inertial pumps 592. In another implementation,object separator 622 may omit at least one of object sensors 580. Insome implementations, object separator 622 may omit fluid ejector 240,wherein fluid is discharged by being directed to further downstreamalong fluid channel 228. As noted above, in some implementations, objectsevers 622 may have a single inertial pump 230 in a single fluid sourceor port through which heterogeneous fluid and the secondary fluid aresupplied in turn. Although object separator 622 is illustrated ascomprising nine electrodes 234, in other implementations, objectseparator 622 may comprise a fewer or greater of such electrodes 234. Asdiscussed above, electrodes 234 may themselves have varying sizes,shapes and arrangements.

Although the present disclosure has been described with reference toexample implementations, workers skilled in the art will recognize thatchanges may be made in form and detail without departing from the scopeof the claimed subject matter. For example, although different exampleimplementations may have been described as including features providingbenefits, it is contemplated that the described features may beinterchanged with one another or alternatively be combined with oneanother in the described example implementations or in other alternativeimplementations. Because the technology of the present disclosure isrelatively complex, not all changes in the technology are foreseeable.The present disclosure described with reference to the exampleimplementations and set forth in the following claims is manifestlyintended to be as broad as possible. For example, unless specificallyotherwise noted, the claims reciting a single particular element alsoencompass a plurality of such particular elements. The terms “first”,“second”, “third” and so on in the claims merely distinguish differentelements and, unless otherwise stated, are not to be specificallyassociated with a particular order or particular numbering of elementsin the disclosure.

What is claimed is:
 1. An object separator for separating an object in afluid, the object separator comprising: a substrate; a fluid channelsupported by the substrate; a pair of electrodes along the fluid channelto form a dielectrophoretic force to interact with an object entrainedin a fluid; and an inertial pump supported by the substrate andpositioned within the fluid channel to move the fluid along the fluidchannel.
 2. The object separator of claim 1 further comprising a fluidejector to eject fluid from the channel.
 3. The object separator ofclaim 1 further comprising a second pair of electrodes along the fluidchannel to form a second dielectrophoretic force, different than thefirst dielectrophoretic force, to interact with a second object,different than the first object, entrained in the fluid.
 4. The objectseparator of claim 1 further comprising: a recirculation passagesupported by the substrate, the recirculation passage having a firstportion connected to the channel on a first side of the pair ofelectrodes and a second portion connected to the channel on a secondside of the pair of electrodes; and a second inertial pump supported bythe substrate to move the fluid along the recirculation passage.
 5. Theobject separator of claim 4, wherein the second inertial pump comprisesa thermal resistor.
 6. The object separator of claim 1, wherein theinertial pump comprises a thermal resistor.
 7. The object separator ofclaim 4 further comprising a holding reservoir connected to therecirculation passage.
 8. The object separator of claim 1 furthercomprising an object sensor supported by the substrate.
 9. The objectseparator of claim 8 further comprising a controller to adjust anoperational parameter of at least one of the inertial pump and the pairof electrodes based upon signals from the object sensor.
 10. A methodfor separating an object in a fluid, the method comprising: moving fluidthrough a channel of a substrate with an inertial pump supported by thesubstrate and positioned with the channel; and applying adielectrophoretic force to an object entrained in the fluid to separatethe object from other objects in the fluid.
 11. The method of claim 10further comprising ejecting fluid from the channel through a nozzle witha fluid actuator.
 12. The method of claim 10, wherein thedielectrophoretic force is applied with a pair of electrodes.
 13. Themethod of claim 11, further comprising recirculating fluid through arecirculation passage from a first side of the pair of electrodes to asecond side of the pair of electrodes.
 14. The method of claim 10,further comprising heating the fluid using a thermal resistor associatedwith the inertial pump.
 15. The method of claim 10, further comprisingmoving the fluid along a recirculation passage supported by thesubstrate.
 16. The method of claim 15, wherein moving the fluid alongthe recirculation passage is by a second inertial pump.
 17. The methodof claim 10, further comprising adjusting an operational parameter usinga controller.
 18. The method of claim 17, wherein adjusting theoperational parameter includes adjusting the inertial pump to move thefluid along the fluid channel, adjusting electrodes positioned along thefluid channel to control the dielectrophoretic force, or both.
 19. Themethod of claim 10, further comprising sensing the object in the fluidusing an object sensor.
 20. The method of claim 19, further comprisingadjusting an operational parameter of the inertial pump, adjustingelectrodes positioned along the fluid channel to control thedielectrophoretic force, or both based on sensing of the objects in thefluid.